{"id":4521,"date":"2025-05-20T20:06:57","date_gmt":"2025-05-21T05:36:57","guid":{"rendered":"https:\/\/jundro.io\/?p=4521"},"modified":"2025-05-20T21:26:14","modified_gmt":"2025-05-21T06:56:14","slug":"ceramic-parts-in-etching-equipment","status":"publish","type":"post","link":"https:\/\/jundro.io\/zh\/\u8680\u523b\u8bbe\u5907\u4e2d\u7684\u9676\u74f7\u90e8\u4ef6\/","title":{"rendered":"\u8680\u523b\u8bbe\u5907\u4e2d\u7684\u9676\u74f7\u90e8\u4ef6"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"4521\" class=\"elementor elementor-4521\" data-elementor-settings=\"{&quot;element_pack_global_tooltip_width&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;element_pack_global_tooltip_width_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;element_pack_global_tooltip_width_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;element_pack_global_tooltip_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_border_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_border_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_border_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true}}\" data-elementor-post-type=\"post\">\n\t\t\t\t<div class=\"elementor-element elementor-element-a2aee0a e-flex e-con-boxed e-con e-parent\" data-id=\"a2aee0a\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-8ec634c elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"8ec634c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u5728\u534a\u5bfc\u4f53\u9886\u57df\uff0c\u8680\u523b\u8bbe\u5907\u662f\u534a\u5bfc\u4f53\u5236\u9020\u7684\u5173\u952e\u5de5\u5e8f\u3002\u5e38\u89c1\u7684\u8680\u523b\u65b9\u6cd5\u5305\u62ec\u5e72\u8680\u523b\u3001\u7b49\u79bb\u5b50\u8680\u523b\u3001\u6d3b\u6027\u79bb\u5b50\u8680\u523b\u7b49\u3002\u5728\u8fd9\u4e9b\u8680\u523b\u8bbe\u5907\u4e2d\uff0c\u901a\u5e38\u4f1a\u4f7f\u7528\u4e00\u4e9b\u8010\u9ad8\u6e29\u3001\u8010\u8150\u8680\u3001\u7edd\u7f18\u7684\u6750\u6599\uff0c\u5982\u9676\u74f7\u6750\u6599 (<span style=\"color: #ff0000;\"><a style=\"color: #ff0000;\" href=\"https:\/\/jundro.io\/zh\/\u6750\u6599\/95-99-\u6c27\u5316\u94dd\/\">\u6c27\u5316\u94dd<\/a><\/span>, <span style=\"color: #ff0000;\"><a style=\"color: #ff0000;\" href=\"https:\/\/jundro.io\/zh\/\u6750\u6599\/\u6c2e\u5316\u94dd\/\">\u6c2e\u5316\u94dd<\/a><\/span>, <span style=\"color: #ff0000;\"><a style=\"color: #ff0000;\" href=\"http:\/\/www.jundro.com\/en\/list\/240.html\" target=\"_blank\" rel=\"noopener\">\u6c2e\u5316\u7845 (Si\u2083N\u2084)<\/a><\/span>, <span style=\"color: #ff0000;\"><a style=\"color: #ff0000;\" href=\"https:\/\/jundro.io\/zh\/\u6750\u6599\/\u78b3\u5316\u7845\/\">\u78b3\u5316\u7845<\/a><\/span>\u7b49\uff09\u3002\u8fd9\u4e9b\u9676\u74f7\u6750\u6599\u5404\u6709\u7279\u70b9\uff0c\u5728\u8680\u523b\u8bbe\u5907\u4e2d\u7684\u5e94\u7528\u4e5f\u5404\u4e0d\u76f8\u540c\u3002\u63a5\u4e0b\u6765\uff0c\u6211\u5c06\u4ecb\u7ecd\u8fd9\u4e9b\u9676\u74f7\u6750\u6599\u5728\u5176\u4e2d\u7684\u4f5c\u7528\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9a2384a elementor-widget elementor-widget-heading\" data-id=\"9a2384a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">1.\u53cd\u5e94\u5ba4\u886c\u91cc<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0cfaa20 elementor-widget elementor-widget-text-editor\" data-id=\"0cfaa20\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:Al\u2082O\u2083, AlN<br \/><strong>\u529f\u80fd<\/strong>:\u51cf\u5c11\u91d1\u5c5e\u6c61\u67d3\uff0c\u4fdd\u62a4\u8154\u4f53\u514d\u53d7\u7b49\u79bb\u5b50\u4f53\u548c\u8150\u8680\u6027\u6c14\u4f53\u7684\u4fb5\u8680<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e4cd870 elementor-widget elementor-widget-image\" data-id=\"e4cd870\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck.jpg\" class=\"attachment-full size-full wp-image-4430\" alt=\"\u9759\u7535\u5438\u76d8\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-865a004 elementor-widget elementor-widget-heading\" data-id=\"865a004\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">2.\u9759\u7535\u5361\u76d8\uff08ESC\uff09<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-65d3253 elementor-widget elementor-widget-text-editor\" data-id=\"65d3253\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:AlN\u3001Al\u2082O\u2083\u3001SiC<br \/><strong>\u529f\u80fd<\/strong>:\u5229\u7528\u9759\u7535\u529b\u56fa\u5b9a\u6676\u7247\uff0c\u9632\u6b62\u6676\u7247\u504f\u79fb\uff0c\u5e76\u5177\u6709\u5bfc\u70ed\u6027\u548c\u7edd\u7f18\u6027<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-57bf0f7 elementor-widget elementor-widget-heading\" data-id=\"57bf0f7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">3.\u914d\u6c14\u76d8<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ec7989a elementor-widget elementor-widget-text-editor\" data-id=\"ec7989a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:\u94dd\u2082O\u2083\u3001\u77f3\u82f1\u3001\u7845\u2083N\u2084<br \/><strong>\u529f\u80fd<\/strong>:\u5c06\u53cd\u5e94\u6c14\u4f53\u5206\u914d\u5230\u8154\u5ba4\u4e2d\uff0c\u786e\u4fdd\u5747\u5300\u8680\u523b<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-991bae6 elementor-widget elementor-widget-image\" data-id=\"991bae6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Semiconductor-Parts.jpg\" class=\"attachment-full size-full wp-image-4029\" alt=\"\u7edd\u7f18\u73af\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Semiconductor-Parts.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Semiconductor-Parts-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Semiconductor-Parts-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Semiconductor-Parts-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cb142d9 elementor-widget elementor-widget-heading\" data-id=\"cb142d9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">4.\u7edd\u7f18\u73af\/\u9694\u79bb\u73af<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-324ce06 elementor-widget elementor-widget-text-editor\" data-id=\"324ce06\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:SiC, Al\u2082O\u2083<br \/><strong>\u529f\u80fd<\/strong>:\u9694\u79bb\u5c04\u9891\u7535\u6781\u548c\u8154\u4f53\uff0c\u907f\u514d\u653e\u7535\u6216\u77ed\u8def<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f5f42de elementor-widget elementor-widget-image\" data-id=\"f5f42de\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Focus-Ring.jpg\" class=\"attachment-full size-full wp-image-4527\" alt=\"\u5bf9\u7126\u73af\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Focus-Ring.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Focus-Ring-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Focus-Ring-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Focus-Ring-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-263d500 elementor-widget elementor-widget-heading\" data-id=\"263d500\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">5.\u5bf9\u7126\u73af<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c82e11d elementor-widget elementor-widget-text-editor\" data-id=\"c82e11d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:Al\u2082O\u2083\u3001SiC\u3001\u77f3\u82f1<br \/><strong>\u529f\u80fd<\/strong>:\u4fdd\u62a4\u6676\u7247\u8fb9\u7f18\uff0c\u9632\u6b62\u8fc7\u5ea6\u8680\u523b<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6584e63 elementor-widget elementor-widget-image\" data-id=\"6584e63\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Aluminum-Nitride-Wafer-Carrier.jpg\" class=\"attachment-full size-full wp-image-4419\" alt=\"\u6c2e\u5316\u94dd\u6676\u7247\u8f7d\u4f53\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Aluminum-Nitride-Wafer-Carrier.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Aluminum-Nitride-Wafer-Carrier-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Aluminum-Nitride-Wafer-Carrier-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Aluminum-Nitride-Wafer-Carrier-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3c60acb elementor-widget elementor-widget-heading\" data-id=\"3c60acb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">6.\u6676\u7247\u652f\u67b6\/\u677f<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0317ca0 elementor-widget elementor-widget-text-editor\" data-id=\"0317ca0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:AlN\u3001SiC\u3001Al\u2082O\u2083<br \/><strong>\u529f\u80fd<\/strong>\u7528\u4e8e\u88c5\u8f7d\u6676\u7247\uff0c\u5177\u6709\u5bfc\u70ed\u548c\u7edd\u7f18\u7279\u6027<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b070994 elementor-widget elementor-widget-image\" data-id=\"b070994\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Quartz-Sapphire-Parts.jpg\" class=\"attachment-full size-full wp-image-4529\" alt=\"\u77f3\u82f1-\u84dd\u5b9d\u77f3-\u90e8\u4ef6\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Quartz-Sapphire-Parts.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Quartz-Sapphire-Parts-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Quartz-Sapphire-Parts-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Quartz-Sapphire-Parts-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b426b44 elementor-widget elementor-widget-heading\" data-id=\"b426b44\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">7.\u89c6\u53e3<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ce64c35 elementor-widget elementor-widget-text-editor\" data-id=\"ce64c35\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:\u77f3\u82f1\uff08SiO\u2082\uff09\u3001\u84dd\u5b9d\u77f3\uff08Al\u2082O\u2083 \u5355\u6676\u4f53<br \/><strong>\u529f\u80fd<\/strong>\u7528\u4e8e\u5149\u5b66\u76d1\u63a7\u7a97\u53e3\uff0c\u8010\u9ad8\u6e29\uff0c\u900f\u5149\u6027\u597d\uff0c\u907f\u514d\u7b49\u79bb\u5b50\u4f53\u635f\u574f<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9e47222 elementor-widget elementor-widget-image\" data-id=\"9e47222\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Heat-conduction-plate.jpg\" class=\"attachment-full size-full wp-image-4089\" alt=\"\u5bfc\u70ed\u677f\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Heat-conduction-plate.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Heat-conduction-plate-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Heat-conduction-plate-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/03\/Heat-conduction-plate-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-daa2ed9 elementor-widget elementor-widget-heading\" data-id=\"daa2ed9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">8.\u52a0\u70ed\u5143\u4ef6<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f954a45 elementor-widget elementor-widget-text-editor\" data-id=\"f954a45\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u6750\u6599<\/strong>:Si\u2083N\u2084, SiC<br \/><strong>\u529f\u80fd<\/strong>\uff1a\u5728\u9ad8\u6e29\u8680\u523b\u65f6\u63d0\u4f9b\u5747\u5300\u52a0\u70ed\uff0c\u786e\u4fdd\u53cd\u5e94\u6548\u7387\uff0c\u5e76\u907f\u514d\u91d1\u5c5e\u6c61\u67d3<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8353065 elementor-widget elementor-widget-spacer\" data-id=\"8353065\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-102e71e elementor-widget elementor-widget-heading\" data-id=\"102e71e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u9676\u74f7\u6750\u6599\u5728\u8680\u523b\u65b9\u9762\u7684\u4f18\u52bf<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-806bbcd elementor-widget elementor-widget-text-editor\" data-id=\"806bbcd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u77f3\u82f1\u84dd\u5b9d\u77f3\u90e8\u4ef6\u7eaf\u5ea6\u9ad8\uff0c\u4e0d\u542b\u91d1\u5c5e\u6742\u8d28\uff0c\u53ef\u907f\u514d\u6c61\u67d3\u3002<\/p><p>\u5bf9\u8150\u8680\u6027\u6c14\u4f53\u6709\u5f88\u5f3a\u7684\u62b5\u6297\u529b\uff0c\u53ef\u957f\u671f\u62b5\u6297 Cl\u2082 \u548c F \u57fa\u6c14\u4f53\u7b49\u8150\u8680\uff0c\u5ef6\u957f\u90e8\u4ef6\u7684\u4f7f\u7528\u5bff\u547d\u3002<\/p><p>\u5bfc\u70ed\/\u9694\u70ed\u6027\u80fd\u53ef\u907f\u514d\u653e\u7535\u6216\u77ed\u8def\uff0c\u9676\u74f7\u6750\u6599\u4f18\u5f02\u7684\u5bfc\u70ed\u6027\u80fd\u53ef\u786e\u4fdd\u6676\u7247\u5de5\u827a\u7684\u6e29\u5ea6\u63a7\u5236\u7cbe\u786e\u5ea6\u3002<\/p><p>\u673a\u68b0\u5f3a\u5ea6\u9ad8\uff0c\u53ef\u7cbe\u786e\u52a0\u5de5\u590d\u6742\u5f62\u72b6\uff0c\u9002\u5e94\u5404\u79cd\u8680\u523b\u5de5\u827a\u73af\u5883<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7bc50da elementor-widget elementor-widget-spacer\" data-id=\"7bc50da\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-879283b elementor-widget elementor-widget-heading\" data-id=\"879283b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u534a\u5bfc\u4f53\u8bbe\u5907\u9676\u74f7\u90e8\u4ef6\u5236\u9020\u5546<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1849c06 elementor-widget elementor-widget-text-editor\" data-id=\"1849c06\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u6211\u4eec\u662f\u4e00\u5bb6\u4e13\u4e1a\u9676\u74f7\u90e8\u4ef6\u5236\u9020\u5546\uff0c\u62e5\u6709\u9ad8\u7cbe\u5ea6\u4e94\u8f74\u52a0\u5de5\u8bbe\u5907\uff0c\u53ef\u5b9e\u73b0\u8d85\u9ad8\u7cbe\u5ea6\uff0c\u5e76\u53ef\u52a0\u5de5\u4e0d\u89c4\u5219\u5f62\u72b6\u3001\u66f2\u9762\u548c\u5176\u4ed6\u4e0d\u89c4\u5219\u7ed3\u6784\u90e8\u4ef6\u3002<\/p><p>\u5982\u679c\u60a8\u9700\u8981\u5b9a\u5236\u534a\u5bfc\u4f53\u8bbe\u5907\u7528\u9676\u74f7\u90e8\u4ef6\uff0c\u8bf7\u968f\u65f6\u8054\u7cfb\u6211\u4eec\u7684\u4e13\u5bb6\uff0c\u6211\u4eec\u5c06\u4e3a\u60a8\u63d0\u4f9b\u670d\u52a1<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e0862fd elementor-widget elementor-widget-button\" data-id=\"e0862fd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"https:\/\/jundro.io\/zh\/\u8054\u7cfb\u6211\u4eec\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">\u83b7\u53d6\u62a5\u4ef7<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>In the semiconductor field, etching equipment is a critical process in semiconductor manufacturing. Common etching methods include dry etching, plasma etching, reactive ion etching, etc. In these etching equipment, some high temperature resistant, corrosion resistant, and insulating materials are usually used, such as ceramic materials (aluminum oxide (Al\u2082O\u2083), aluminum nitride (AlN), silicon nitride (Si\u2083N\u2084), silicon [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[],"class_list":["post-4521","post","type-post","status-publish","format-standard","hentry","category-material-news"],"_links":{"self":[{"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/posts\/4521","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/comments?post=4521"}],"version-history":[{"count":0,"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/posts\/4521\/revisions"}],"wp:attachment":[{"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/media?parent=4521"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/categories?post=4521"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/jundro.io\/zh\/wp-json\/wp\/v2\/tags?post=4521"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}