Semiconductor Ceramic Parts — Precision Components for Semiconductor Manufacturing

Frankly speaking, in the five years we’ve been working in the field of technical ceramics, over 60% of our products serve the semiconductor industry. Among these, the most supplied materials are undoubtedly alumina, aluminum nitride, silicon carbide, zerodur, and fused silica. These materials are commonly used in critical stages of semiconductor manufacturing, such as wafer supports, heating platforms, vacuum chambers, precision positioning components, and structural and insulating parts for high-temperature, high-cleanliness environments.

Key Specifications of Our Semiconductor Ceramic Parts

Materials: Al₂O₃, AlN, SiC, Zerodur、Fused Quartz
Dimensional Tolerance: ±0.001 mm for critical surfaces
Surface Finish: Ra 0.01–0.002 µm depending on application
Thermal Conductivity: Material-specific, e.g., AlN up to 180 W/m·K
Dielectric Properties: Low-loss ceramics suitable for RF and high-frequency applications
Vacuum & Chemical Resistance: Tested for UHV < 1×10⁻⁹ mbar and aggressive chemistries

Manufacturing & Quality Control

✅ CNC Machining: 3/4/5-axis milling, polishing, micro-drilling

✅ Inspection: CMM, interferometry, Roundness tester

✅ Certifications: ISO 9001/ISO 14001 /ISO 13485/SGS Material Certification

Case

Semiconductor aluminum nitride ceramic carriers are primarily used for wafer transport. By fully utilizing the high thermal conductivity and excellent electrical insulation of aluminum nitride, they effectively reduce thermal stress and prevent electrostatic damage, thereby ensuring the safe and undamaged transport and processing of wafers.

Read full case study: /https://jundro.io/aluminum-nitride-wafer-carrier/

Why Choose Our Semiconductor Ceramic Parts

At Jundro, we have accumulated extensive experience in meeting the stringent requirements of semiconductor manufacturing for high-precision, high-stability ceramic parts. Our expertise covers high-temperature resistance, superior insulation performance, and precision microstructure fabrication. By leveraging advanced processing equipment and mature technologies, Jundro delivers reliable, customized ceramic solutions that support the efficient operation of the semiconductor supply chain.

Al₂O₃ Ceramic Parts: /materials/95-99-alumina

AlN Ceramic Parts: /materials/aluminum-nitride

Silicon carbide ceramics (SiC): /materials/silicon-carbide

Zerodur low-expansion glass ceramics: /materials/zerodur

Fused silica Glass: /fused-silica-glass

Request a Quote: /contact