石英部品加工

Definition of Fused Quartz

Fused Quartz / Fused Silica is an amorphous glass obtained by melting and rapidly cooling high-purity silicon dioxide. It features an extremely low coefficient of thermal expansion, excellent optical transmission (covering UV–visible–infrared ranges), high thermal resistance, and strong chemical corrosion resistance. These properties make it a key material in demanding applications such as semiconductor equipment components, aerospace sensors, and vacuum chambers.

Fused-Quartz-Parts-Machining

Fused Quartz Parts Machining Capabilities

  • Machining Equipment: Multi-axis CNC precision milling, laser cutting & marking, ultra-precision surface grinding & polishing, ultrasonic cleaning, and cleanroom packaging.

  • High-Precision Capabilities:

    • Complex shapes: tolerances up to ±0.01 mm

    • Cylindrical/shaft components: tolerances up to ±0.001 mm

    • Surface flatness: up to 0.001 mm

    • Optical flatness: up to 1/20λ (depending on wavelength)

    • Micro-holes: diameters as small as 0.1 mm (tolerance ±0.01 mm)

    • Surface roughness: Ra 0.01 μm for structural parts, Ra 0.002 μm for optical components

  • Surface Treatment: Polishing, optical coating

  • Inspection Equipment: Coordinate Measuring Machine (CMM), interferometer, profilometer, surface roughness tester, roundness tester, etc.

  • Quality System: ISO 9001 & ISO 14001, ISO 13485 certified. Inspection reports provided (FAR/FAI, measurement reports, surface quality reports).

Machining Process Flow (From Drawing to Finished Part)

  1. Requirement Confirmation & DFx Review: Upon receiving 2D/3D drawings, material specifications, critical tolerances, batch size, and delivery schedule, a machinability assessment is conducted. Design optimization suggestions are provided (e.g., hole buffering, minimum wall thickness, support structures).

  2. Material Preparation: Procure fused quartz plates/rods/preforms according to grade, with full batch records and certificates.

  3. Rough Machining: Saw cutting and CNC rough milling to achieve near-net shape, leaving allowance for polishing.

  4. Thermal Stress Annealing (if required): Relieve residual machining stress to prevent cracks during subsequent processes.

  5. 精密機械加工: Multi-axis machining, micro-holes, angled holes, and other fine features.

  6. Ultra-Precision Grinding & Polishing: Achieve required flatness and optical-grade surface roughness.

  7. Cleaning & Coating (if required): Ultrasonic/DI water cleaning, vacuum drying, and pre-treatment for anti-reflective or protective coatings.

  8. Final Inspection & Packaging: Inspection reports issued according to the quality plan. Components are packed in anti-static, cleanroom packaging with batch and inspection labels.

Common Specifications & Feasibility

  • Minimum Feature Size: Micro-holes from 0.1 mm; smaller features possible with evaluation of sample requirements.

  • Dimensional Tolerances: ±0.01 mm for complex surfaces; ±0.001 mm for shafts and cylindrical parts.

  • Flatness / Optical Requirements: 0.001 mm flatness for structural parts; optical flatness up to 1/20λ.

  • 表面粗さ: Ra 0.01 μm for structural components; Ra 0.002 μm for optical components.

  • Maximum Machining Size: Adjustable according to material blanks and equipment capacity — drawings welcome for confirmation.

お問い合わせ

Common Specifications & Feasibility

  • Laser Windows and Optical Tables: High-transmittance windows and heat-resistant windows for high-energy laser systems.
  • Semiconductor Equipment Components: High-purity, low-volatility, vacuum-compatible support components.
  • Vacuum Chamber Windows: Low-outgassing windows for inspection and optical detectors.
  • Sensors and Aerospace Optics: Maintaining optical stability in harsh temperature and radiation environments.
  • Fused quartz vs. borosilicate glass: Fused quartz offers significant advantages over borosilicate glass in terms of high-temperature stability, UV transmittance, and low expansion, but it is more expensive.
  • Fused quartz vs. alumina/ceramics: Ceramics offer greater rigidity and wear resistance, but cannot replace fused quartz in terms of optical clarity and UV performance.

Yes. We support production from prototype to small and medium batches. Please send us your drawings first to get a quote.

Depending on the complexity of the drawing and the batch size, the sample usually takes 7-14 working days (depending on material preparation and process)
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