{"id":4426,"date":"2025-05-06T20:39:44","date_gmt":"2025-05-07T06:09:44","guid":{"rendered":"https:\/\/jundro.io\/?page_id=4426"},"modified":"2025-05-06T22:44:25","modified_gmt":"2025-05-07T08:14:25","slug":"semiconductor-sic-electrostatic-chuck","status":"publish","type":"page","link":"https:\/\/jundro.io\/ja\/\u534a\u5c0e\u4f53\u9759\u96fb\u30c1\u30e3\u30c3\u30af\/","title":{"rendered":"\u534a\u5c0e\u4f53SiC\u9759\u96fb\u30c1\u30e3\u30c3\u30af"},"content":{"rendered":"<div data-elementor-type=\"wp-page\" data-elementor-id=\"4426\" class=\"elementor elementor-4426\" 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data-elementor-post-type=\"page\">\n\t\t\t\t<div class=\"elementor-element elementor-element-8b251d8 e-flex e-con-boxed e-con e-parent\" data-id=\"8b251d8\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-1fcd631 e-flex e-con-boxed e-con e-parent\" data-id=\"1fcd631\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-dec97b0 e-flex e-con-boxed e-con e-child\" data-id=\"dec97b0\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-de99823 elementor-widget elementor-widget-heading\" data-id=\"de99823\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">\u534a\u5c0e\u4f53SiC\u9759\u96fb\u30c1\u30e3\u30c3\u30af<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c47abf8 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"c47abf8\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-786de6c elementor-widget elementor-widget-heading\" data-id=\"786de6c\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u84b8\u7740\u3001CMP\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u30a6\u30a7\u30cf\u30fc\u56fa\u5b9a\u306b\u4f7f\u7528<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-287fbd2 e-con-full e-flex e-con e-child\" data-id=\"287fbd2\" data-element_type=\"container\">\n\t\t<div class=\"elementor-element elementor-element-89c853b e-con-full e-flex e-con e-child\" data-id=\"89c853b\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e445f68 elementor-widget elementor-widget-text-editor\" data-id=\"e445f68\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u534a\u5c0e\u4f53 <span style=\"color: #ff0000;\"><a style=\"color: #ff0000;\" href=\"https:\/\/jundro.io\/ja\/\u6750\u6599\/\u70ad\u5316\u30b1\u30a4\u7d20\/\">\u70ad\u5316\u30b1\u30a4\u7d20<\/a><\/span> \u9759\u96fb\u30c1\u30e3\u30c3\u30af\uff08ESC\uff09\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u84b8\u7740\u3001CMP\u3067\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u308b\u90e8\u54c1\u3067\u3059\u3002\u30af\u30fc\u30ed\u30f3\u529b\u3084\u30b8\u30e7\u30f3\u30bd\u30f3\u30fb\u30e9\u30d9\u30c3\u30af\u52b9\u679c\u3092\u5229\u7528\u3057\u3001\u6a5f\u68b0\u7684\u306a\u30af\u30e9\u30f3\u30d7\u3092\u8ffd\u52a0\u3059\u308b\u3053\u3068\u306a\u304f\u30a6\u30a7\u30fc\u30cf\u3092\u5f37\u56fa\u306b\u56fa\u5b9a\u3057\u307e\u3059\u3002\u540c\u6642\u306b\u3001SiC\u88fd\u306eESC\u306f\u3001\u8150\u98df\u3084\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u306b\u304a\u3044\u3066\u8d85\u9ad8\u8010\u4e45\u6027\u3092\u767a\u63ee\u3057\u307e\u3059\u3002<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4dc7344 e-con-full e-flex e-con e-child\" data-id=\"4dc7344\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-7f5559a elementor-widget elementor-widget-text-editor\" data-id=\"7f5559a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>SiC ESC\u30b1\u30fc\u30b9<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-96e5d94 e-con-full e-flex e-con e-child\" data-id=\"96e5d94\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-42e72b5 elementor-widget elementor-widget-image\" data-id=\"42e72b5\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck.jpg\" class=\"attachment-full size-full wp-image-4430\" alt=\"\u9759\u96fb\u30c1\u30e3\u30c3\u30af\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ce9c8c3 elementor-widget elementor-widget-spacer\" data-id=\"ce9c8c3\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-fb18e0e e-con-full e-flex e-con e-child\" data-id=\"fb18e0e\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t<div class=\"elementor-element elementor-element-14ce364 elementor-widget elementor-widget-heading\" data-id=\"14ce364\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9f9a36e elementor-widget elementor-widget-text-editor\" data-id=\"9f9a36e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u2705 \u8d85\u9ad8\u71b1\u4f1d\u5c0e\u6027\u306b\u3088\u308a\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3084\u6210\u819c\u306e\u30d7\u30ed\u30bb\u30b9\u7cbe\u5ea6\u304c\u5411\u4e0a\u3059\u308b\u3002<\/p><p>\u8150\u98df\u6027\u30ac\u30b9\u306b\u5f37\u3044\u8010\u6027 \u2705 \u8150\u98df\u6027\u30ac\u30b9\u306b\u5f37\u3044\u8010\u6027<\/p><p>\u512a\u308c\u305f\u9ad8\u6e29\u5b89\u5b9a\u6027 \u2705 \u9ad8\u6e29\u3067\u3082\u69cb\u9020\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3067\u304d\u308b<\/p><p>\u2705 \u9ad8\u3044\u786c\u5ea6\u3068\u8010\u6469\u8017\u6027\u3067\u3001\u9577\u671f\u4f7f\u7528\u6642\u306e\u6469\u8017\u3084\u7c92\u5b50\u6c5a\u67d3\u304c\u306a\u3044<\/p><p>SiC 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data-id=\"b50f4a1\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u30d7\u30e9\u30ba\u30de\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0<\/strong><\/p><p><strong>\u2705 <\/strong><strong style=\"font-size: 16px;\">\u30a4\u30aa\u30f3\u6ce8\u5165<\/strong><\/p><p><strong style=\"font-size: 16px;\">\u2705 <\/strong><strong style=\"font-size: 16px;\">\u5316\u5b66\u84b8\u7740\uff0f\u7269\u7406\u84b8\u7740<\/strong><\/p><p><strong style=\"font-size: 16px;\">\u2705 <\/strong><strong style=\"font-size: 16px;\">\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-ab3a379 e-con-full e-flex e-con e-child\" data-id=\"ab3a379\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t<div class=\"elementor-element elementor-element-9b915f0 elementor-widget elementor-widget-heading\" data-id=\"9b915f0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">\u79c1\u305f\u3061\u306b\u3067\u304d\u308b\u3053\u3068<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-529462c elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"529462c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u771f\u7a7a\u30c1\u30e3\u30c3\u30af\u3001\u30a6\u30a7\u30cf\u30fc\u30b5\u30dd\u30fc\u30c8\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3001\u30a8\u30f3\u30c9\u30a8\u30d5\u30a7\u30af\u30bf\u30fc\u3001\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30ed\u30dc\u30c3\u30c8\u30a2\u30fc\u30e0\u53ca\u3073\u305d\u306e\u4ed6\u306e\u30bb\u30e9\u30df\u30c3\u30af\u90e8\u54c1\uff09\u3002\u5f0a\u793e\u306f\u5c02\u9580\u7684\u306a\u4e94\u8ef8\u52a0\u5de5\u8a2d\u5099\u3068\u8c4a\u5bcc\u306a\u7d4c\u9a13\u3092\u6301\u3063\u3066\u304a\u308a\u3001\u7570\u8cea\u3001\u5186\u5f62\u3001\u66f2\u9762\u306e\u30d1\u30c3\u30b1\u30fc\u30b8\u90e8\u54c1\u3092\u52a0\u5de5\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3059\u3079\u3066\u306e\u516c\u5dee\u306f\u3001\u5b9f\u969b\u306e\u30b5\u30a4\u30ba\u3068\u5f62\u72b6\u306b\u5fdc\u3058\u3066\u6539\u5584\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u304a\u5ba2\u69d8\u306e\u88c5\u7f6e\u3068\u7279\u5b9a\u306e\u30cb\u30fc\u30ba\u306b\u5b8c\u5168\u306b\u4e00\u81f4\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div 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value=\"ja\"\/><\/form>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Semiconductor SiC Electrostatic Chuck Used for wafer fixation during etching, deposition or CMP processes The semiconductor silicon carbide electrostatic chuck (ESC) is a component commonly used in etching, deposition or CMP. It uses Coulomb force or Johnson-Rabec effect to firmly fix the wafer without the need for additional mechanical clamps. At the same time, the [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"full-width-container","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-4426","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/pages\/4426","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/comments?post=4426"}],"version-history":[{"count":0,"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/pages\/4426\/revisions"}],"wp:attachment":[{"href":"https:\/\/jundro.io\/ja\/wp-json\/wp\/v2\/media?parent=4426"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}