Zerodur Substrate

Zerodur substrate is a glass-ceramic material with ultra-low thermal expansion coefficient and excellent mechanical stability. It is used in semiconductor die bonding, optical primary mirrors, measuring instruments, etc. Its core characteristic is a near-zero thermal expansion coefficient (CTE) (CTE≈0±0.05×10⁻⁶/K in the range of 0–50°C) (Click to view detailed information of zerodur)

Zerodur Substrate Features

Extreme temperature stability
(in extreme industrial environments) will not cause thermal expansion and contraction to cause structural deformation and failure
Example: Satellite optical systems undergo temperature cycles from -150°C to +120°C in low Earth orbit, and Zerodur Substrate remains stable in position

Excellent dimensional stability
Can maintain sub-micron dimensional precision for a long time, which is particularly suitable for optical systems and astronomical equipment
Case: Europe’s extremely large telescope mirror substrate uses zerodur, which can control deformation under gravity and temperature changes

Anti-environmental interference
Good resistance to corrosive substances and radiation
Example: Optical components used to support high-energy lasers in nuclear fusion experimental devices

Ultra-high optical properties
zerodur Substrate has excellent light transmittance, low bubbles and impurities, and high uniformity
Example: Reflector substrate for laser interferometer to reduce optical path distortion

Ultra-low CTE coefficient
With a variety of different thermal expansion coefficient levels, it can meet the needs of various projects
Example: Die bonding Zerodur substrate, used for chip mounting

Application Areas

✅ Astronomy and space optics (such as auxiliary mirrors of the James Webb Telescope, satellite optical payloads)

✅ Semiconductor and microelectronics manufacturing (lithography mask stage, packaging, die bonding substrate)

✅ Quantum and measurement (superconducting quantum bit substrate, atomic clock resonant cavity substrate)

✅ Scientific research equipment (laser reflector substrate, measuring instrument guide substrate)

✅ Nuclear industry applications (plasma system optical window, Mars rover substrate)

Zerodur Substrate Manufacturers

We support a variety of specifications of Zerodur Substrate, suitable for multiple industries and equipment. Using our professional machining experience and equipment, we can also customize zerodur materials according to your project needs.

Irregular Structural Parts: Machining accuracy of 0.01mm
Pipes and Rods: Cylindricity of 0.001mm, dimensional accuracy of 0.001mm
Flat Surfaces: Structural part flatness accuracy up to 0.001mm, optical products with flatness accuracy of up to 1/20λ
Microhole Structures: Minimum diameter of 0.1mm, accuracy of 0.01mm
Roughness: Structural parts with Ra0.01um, optical products with Ra0.002um