Aluminum nitride wafer carrier is a carrier used to transport wafers in semiconductor equipment (such as deposition, etching or heat treatment) steps. It can fix the wafer through electrostatic adsorption technology to prevent the wafer from warping and deformation. Common ones are general 12 inch 300mm AlN (Aluminum Nitride) Wafer Carrier size and customized AIN carrier. Aluminum nitride ceramic has super high thermal conductivity, electrical insulation, non-toxic and environmentally friendly, and can also be processed into complex shapes (electrostatic chuck, heater, clamp, arm and other components)
Key Features of AlN Wafer Carriers
- Thermal conductivity is as high as 170W/m·K, which can effectively dissipate heat for semiconductor devices
- Good insulation performance, which can prevent device damage caused by static electricity
- Chemical resistance, can be used in harsh environments
- Strong dimensional stability, can be accurately positioned
- Suitable for precision processing, supports complex shapes
- Non-toxic and environmentally friendly
Aluminum Nitride Typical Applications
- Wafer handling in CVD/PECVD and plasma etching systems
- Substrate holders for power devices
- Direct Wafer Bonding
- Semiconductor thermal pads
- Wafer carriers
- Arm grippers
Contact Us
We are a professional manufacturer of ultra-hard ceramic materials and have extensive experience in aluminum nitride ceramic processing. Whether you need to order sheets, rods, tubes, wafer carriers, heat conducting plates or other custom AIN components for your project, you can contact our experts for a free consultation and we will be happy to provide you with service.
Not sure which ceramic material is suitable for your application? Contact our experts for assistance
Español 
简体中文 
Deutsch (Sie) 
日本語 
English