Silicon Carbide Optical Mirrors

Lightweight, low thermal expansion, resistance to thermal deformation, etc.

Silicon carbide optical mirrors can maintain their shape and optical precision even under drastic temperature changes in optical applications. High thermal conductivity and low CTE also allow SiC mirrors to quickly absorb heat and reduce mirror distortion caused by thermal stress.

Roughness Ra0.002um

Silicon Carbide Optical Mirrors Properties

Component	Unit	Requirement
SiC	%	≥83
Si	%	≤16

Property	Unit	Value
Density	g/cm³	≥3.02
Porosity	%	≤0.3
Flexural Strength	MPa	≥250 (20℃)
Elastic Modulus	GPa	≥300 (20℃)
Elastic Modulus	GPa	≥140 (25℃)
Thermal Expansion Coefficient	(25–1200℃) ×10⁻⁶℃⁻¹	≤4.5±0.5
Vickers Hardness	GPa	≥20

Note: This value is for reference only and may vary slightly from batch to batch.

Applications

Astronomy and Space Optics
SiC optical mirrors have extremely low CTE and thermal stability, and are almost not deformed under temperature changes. Typical applications include the Herschel Space Telescope, which is not made of glass, but of sintered silicon carbide.

High-speed laser scanning and processing system
High-speed laser scanning systems use mirrors made of silicon carbide to replace glass and silicon mirrors, which has obvious advantages over traditional materials. Low density and high specific rigidity allow SiC to produce low-inertia, fast-response reflectors

Research facilities
SiC as a multilayer reflector substrate (ultra-smooth surface required) in extreme ultraviolet (EUV) lithography machines (ASML) can effectively reduce thermal drift during lithography and improve overlay accuracy

About Product Manufacturing

Jundro is a high-quality technical ceramic machining manufacturer, specializing in providing excellent services by utilizing technical expertise and advanced equipment. We offer customized machining of various high-precision ceramic parts, including irregular shapes, round shapes, and curved surfaces, with the capability of 5-axis precision machining.

Irregular Structural Parts: Machining accuracy of 0.01mm
Pipes and Rods: Cylindricity of 0.001mm, dimensional accuracy of 0.001mm
Flat Surfaces: Structural part flatness accuracy up to 0.001mm, optical products with flatness accuracy of up to 1/20λ
Microhole Structures: Minimum diameter of 0.1mm, accuracy of 0.01mm
Roughness: Structural parts with Ra0.01um, optical products with Ra0.002um

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