Zerodur-Substrat

Zerodur substrate is a glass-ceramic material with ultra-low thermal expansion coefficient and excellent mechanical stability. It is used in semiconductor die bonding, optical primary mirrors, measuring instruments, etc. Its core characteristic is a near-zero thermal expansion coefficient (CTE) (CTE≈0±0.05×10⁻⁶/K in the range of 0–50°C) (Click to view detailed information of zerodur)

Zerodur Substrate Features

Extreme temperature stability
(in extreme industrial environments) will not cause thermal expansion and contraction to cause structural deformation and failure
Example: Satellite optical systems undergo temperature cycles from -150°C to +120°C in low Earth orbit, and Zerodur Substrate remains stable in position

Excellent dimensional stability
Can maintain sub-micron dimensional precision for a long time, which is particularly suitable for optical systems and astronomical equipment
Case: Europe’s extremely large telescope mirror substrate uses zerodur, which can control deformation under gravity and temperature changes

Anti-environmental interference
Good resistance to corrosive substances and radiation
Example: Optical components used to support high-energy lasers in nuclear fusion experimental devices

Ultra-high optical properties
zerodur Substrate has excellent light transmittance, low bubbles and impurities, and high uniformity
Example: Reflector substrate for laser interferometer to reduce optical path distortion

Ultra-low CTE coefficient
With a variety of different thermal expansion coefficient levels, it can meet the needs of various projects
Example: Die bonding Zerodur substrate, used for chip mounting

Application Areas

✅ Astronomy and space optics (such as auxiliary mirrors of the James Webb Telescope, satellite optical payloads)

✅ Semiconductor and microelectronics manufacturing (lithography mask stage, packaging, die bonding substrate)

✅ Quantum and measurement (superconducting quantum bit substrate, atomic clock resonant cavity substrate)

✅ Scientific research equipment (laser reflector substrate, measuring instrument guide substrate)

✅ Nuclear industry applications (plasma system optical window, Mars rover substrate)

Zerodur Substrate Manufacturers

We support a variety of specifications of Zerodur Substrate, suitable for multiple industries and equipment. Using our professional machining experience and equipment, we can also customize zerodur materials according to your project needs.

Unregelmäßige Strukturteile: Bearbeitungsgenauigkeit von 0,01 mm
Rohre und Stäbe: Zylindrizität von 0,001 mm, Maßhaltigkeit von 0,001 mm
Flache Oberflächen: Ebenheitsgenauigkeit von Strukturteilen bis zu 0,001 mm, optische Produkte mit einer Ebenheitsgenauigkeit von bis zu 1/20λ
Mikroloch-Strukturen: Mindestdurchmesser von 0,1 mm, Genauigkeit von 0,01 mm
Rauhigkeit: Strukturelle Teile mit Ra0.01um, optische Produkte mit Ra0.002um