{"id":4426,"date":"2025-05-06T20:39:44","date_gmt":"2025-05-07T06:09:44","guid":{"rendered":"https:\/\/jundro.io\/?page_id=4426"},"modified":"2025-05-06T22:44:25","modified_gmt":"2025-05-07T08:14:25","slug":"semiconductor-sic-electrostatic-chuck","status":"publish","type":"page","link":"https:\/\/jundro.io\/de\/halbleiter-elektrostatisches-spannfutter-2\/","title":{"rendered":"Halbleiter SiC Electrostatic Chuck"},"content":{"rendered":"<div data-elementor-type=\"wp-page\" data-elementor-id=\"4426\" class=\"elementor elementor-4426\" data-elementor-settings=\"{&quot;element_pack_global_tooltip_width&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;element_pack_global_tooltip_width_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;element_pack_global_tooltip_width_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;element_pack_global_tooltip_padding&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_padding_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_padding_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_border_radius&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_border_radius_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true},&quot;element_pack_global_tooltip_border_radius_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;top&quot;:&quot;&quot;,&quot;right&quot;:&quot;&quot;,&quot;bottom&quot;:&quot;&quot;,&quot;left&quot;:&quot;&quot;,&quot;isLinked&quot;:true}}\" data-elementor-post-type=\"page\">\n\t\t\t\t<div class=\"elementor-element elementor-element-8b251d8 e-flex e-con-boxed e-con e-parent\" data-id=\"8b251d8\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-1fcd631 e-flex e-con-boxed e-con e-parent\" data-id=\"1fcd631\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-dec97b0 e-flex e-con-boxed e-con e-child\" data-id=\"dec97b0\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-de99823 elementor-widget elementor-widget-heading\" data-id=\"de99823\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Halbleiter SiC Electrostatic Chuck<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c47abf8 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"c47abf8\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-786de6c elementor-widget elementor-widget-heading\" data-id=\"786de6c\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Zur Fixierung von Wafern w\u00e4hrend \u00c4tz-, Ablagerungs- oder CMP-Prozessen<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-287fbd2 e-con-full e-flex e-con e-child\" data-id=\"287fbd2\" data-element_type=\"container\">\n\t\t<div class=\"elementor-element elementor-element-89c853b e-con-full e-flex e-con e-child\" data-id=\"89c853b\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-e445f68 elementor-widget elementor-widget-text-editor\" data-id=\"e445f68\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Der Halbleiter <span style=\"color: #ff0000;\"><a style=\"color: #ff0000;\" href=\"https:\/\/jundro.io\/de\/materialien-2\/siliziumkarbid\/\">Siliziumkarbid<\/a><\/span> Der elektrostatische Chuck (ESC) ist ein Bauteil, das h\u00e4ufig beim \u00c4tzen, bei der Abscheidung oder bei der CMP verwendet wird. Es nutzt die Coulomb-Kraft oder den Johnson-Rabec-Effekt, um den Wafer fest zu fixieren, ohne dass zus\u00e4tzliche mechanische Klemmen erforderlich sind. Gleichzeitig ist der ESC aus SiC sehr widerstandsf\u00e4hig gegen Korrosion und Plasmabedingungen.<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4dc7344 e-con-full e-flex e-con e-child\" data-id=\"4dc7344\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-7f5559a elementor-widget elementor-widget-text-editor\" data-id=\"7f5559a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>SiC ESC-Geh\u00e4use<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-96e5d94 e-con-full e-flex e-con e-child\" data-id=\"96e5d94\" data-element_type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-42e72b5 elementor-widget elementor-widget-image\" data-id=\"42e72b5\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"888\" height=\"592\" src=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck.jpg\" class=\"attachment-full size-full wp-image-4430\" alt=\"elektrostatisches Spannfutter\" srcset=\"https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck.jpg 888w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-300x200.jpg 300w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-768x512.jpg 768w, https:\/\/jundro.io\/wp-content\/uploads\/2025\/05\/Semiconductor-SiC-Electrostatic-Chuck-18x12.jpg 18w\" sizes=\"(max-width: 888px) 100vw, 888px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ce9c8c3 elementor-widget elementor-widget-spacer\" data-id=\"ce9c8c3\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-fb18e0e e-con-full e-flex e-con e-child\" data-id=\"fb18e0e\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t<div class=\"elementor-element elementor-element-14ce364 elementor-widget elementor-widget-heading\" data-id=\"14ce364\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Leistung<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9f9a36e elementor-widget elementor-widget-text-editor\" data-id=\"9f9a36e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Die ultrahohe W\u00e4rmeleitf\u00e4higkeit kann die Prozessgenauigkeit beim \u00c4tzen oder Abscheiden verbessern.<\/p><p>\u2705 Hohe Best\u00e4ndigkeit gegen korrosive Gase<\/p><p>\u2705 Hervorragende Hochtemperaturstabilit\u00e4t, kann die strukturelle Stabilit\u00e4t bei hohen Temperaturen beibehalten<\/p><p>\u2705 Hohe H\u00e4rte und Verschlei\u00dffestigkeit, keine Abnutzung oder Verunreinigung durch Partikel bei Langzeiteinsatz<\/p><p>\u2705 SiC Electrostatic Chuck hat einen hohen spezifischen Widerstand und erf\u00fcllt die Eigenschaften der elektrostatischen Adsorption<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-68121fc e-con-full e-flex e-con e-child\" data-id=\"68121fc\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t<div class=\"elementor-element elementor-element-d506624 elementor-widget elementor-widget-heading\" data-id=\"d506624\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Anwendungen<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b50f4a1 elementor-widget elementor-widget-text-editor\" data-id=\"b50f4a1\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>\u2705 Plasma-\u00c4tzen<\/strong><\/p><p><strong>\u2705 <\/strong><strong style=\"font-size: 16px;\">Ionen-Implantation<\/strong><\/p><p><strong style=\"font-size: 16px;\">\u2705 <\/strong><strong style=\"font-size: 16px;\">Chemische Gasphasenabscheidung\/physikalische Gasphasenabscheidung<\/strong><\/p><p><strong style=\"font-size: 16px;\">\u2705 <\/strong><strong style=\"font-size: 16px;\">Fotolithografie<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-ab3a379 e-con-full e-flex e-con e-child\" data-id=\"ab3a379\" data-element_type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t<div class=\"elementor-element elementor-element-9b915f0 elementor-widget elementor-widget-heading\" data-id=\"9b915f0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Was wir tun k\u00f6nnen<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-529462c elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"529462c\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Wir sind ein professioneller Hersteller von ultraharten Materialien und bieten vielf\u00e4ltige und kundenspezifische Komponenten f\u00fcr die Halbleiterindustrie an, wie z. B. Vakuumspannvorrichtungen, Wafertr\u00e4gerplattformen, Endeffektoren, Wafer-Handling-Roboterarme und andere Keramikkomponenten. Wir verf\u00fcgen \u00fcber professionelle F\u00fcnf-Achsen-Bearbeitungsausr\u00fcstung und reiche Erfahrung und k\u00f6nnen Geh\u00e4usebauteile mit heterogenen, runden und gekr\u00fcmmten Oberfl\u00e4chen bearbeiten. Alle Toleranzen k\u00f6nnen je nach tats\u00e4chlicher Gr\u00f6\u00dfe und Form verbessert werden, damit sie perfekt zu Ihrer Ausr\u00fcstung und Ihren spezifischen Bed\u00fcrfnissen passen.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3978048 elementor-widget elementor-widget-spacer\" data-id=\"3978048\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a595bcd elementor-widget elementor-widget-heading\" data-id=\"a595bcd\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Kontaktieren Sie uns \u00fcber das Formular<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a8e5c8b elementor-widget elementor-widget-text-editor\" data-id=\"a8e5c8b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Sie sind sich nicht sicher, welcher keramische Werkstoff f\u00fcr Ihre Anwendung geeignet ist? Kontaktieren Sie unsere Experten f\u00fcr Hilfe<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-24443e5 elementor-button-align-stretch elementor-widget elementor-widget-form\" data-id=\"24443e5\" data-element_type=\"widget\" data-settings=\"{&quot;step_next_label&quot;:&quot;Next&quot;,&quot;step_previous_label&quot;:&quot;Previous&quot;,&quot;button_width&quot;:&quot;100&quot;,&quot;step_type&quot;:&quot;number_text&quot;,&quot;step_icon_shape&quot;:&quot;circle&quot;}\" data-widget_type=\"form.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<form class=\"elementor-form\" method=\"post\" name=\"Material Page Form\" aria-label=\"Material Seite Formular\" action=\"\">\n\t\t\t<input type=\"hidden\" name=\"post_id\" value=\"4426\"\/>\n\t\t\t<input type=\"hidden\" name=\"form_id\" value=\"24443e5\"\/>\n\t\t\t<input type=\"hidden\" name=\"referer_title\" value=\"\" \/>\n\n\t\t\t\n\t\t\t<div class=\"elementor-form-fields-wrapper elementor-labels-\">\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-text elementor-field-group elementor-column elementor-field-group-name elementor-col-50 elementor-field-required\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-name\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\tName\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<input size=\"1\" type=\"text\" name=\"form_fields[name]\" id=\"form-field-name\" class=\"elementor-field elementor-size-md  elementor-field-textual\" placeholder=\"Name*\" required=\"required\">\n\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-email elementor-field-group elementor-column elementor-field-group-email elementor-col-50 elementor-field-required\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-email\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\tE-Mail\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<input size=\"1\" type=\"email\" name=\"form_fields[email]\" id=\"form-field-email\" class=\"elementor-field elementor-size-md  elementor-field-textual\" placeholder=\"E-Mail*\" required=\"required\">\n\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-tel elementor-field-group elementor-column elementor-field-group-field_d348200 elementor-col-50\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-field_d348200\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\tTelefon\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t<input size=\"1\" type=\"tel\" name=\"form_fields[field_d348200]\" id=\"form-field-field_d348200\" class=\"elementor-field elementor-size-md  elementor-field-textual\" placeholder=\"Telefon\" pattern=\"[0-9()#&amp;+*-=.]+\" title=\"Es werden nur Zahlen und Telefonbuchstaben (#, -, *, usw.) akzeptiert.\">\n\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-text elementor-field-group elementor-column elementor-field-group-Company elementor-col-50\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-Company\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\tUnternehmen\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<input size=\"1\" type=\"text\" name=\"form_fields[Company]\" id=\"form-field-Company\" class=\"elementor-field elementor-size-md  elementor-field-textual\" placeholder=\"Unternehmen\">\n\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-textarea elementor-field-group elementor-column elementor-field-group-message elementor-col-100\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-message\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\tNachricht\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t<textarea class=\"elementor-field-textual elementor-field  elementor-size-md\" name=\"form_fields[message]\" id=\"form-field-message\" rows=\"4\" placeholder=\"Nachricht\"><\/textarea>\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-upload elementor-field-group elementor-column elementor-field-group-field_e561de7 elementor-col-100\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-field_e561de7\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\tAnh\u00e4nge hochladen\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t<input type=\"file\" name=\"form_fields[field_e561de7][]\" id=\"form-field-field_e561de7\" class=\"elementor-field elementor-size-md  elementor-upload-field\" multiple=\"multiple\">\n\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-group elementor-column elementor-field-type-submit elementor-col-100 e-form__buttons\">\n\t\t\t\t\t<button class=\"elementor-button elementor-size-sm\" type=\"submit\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Senden Sie<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/button>\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\t\t<input type=\"hidden\" name=\"trp-form-language\" value=\"de\"\/><\/form>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>Semiconductor SiC Electrostatic Chuck Used for wafer fixation during etching, deposition or CMP processes The semiconductor silicon carbide electrostatic chuck (ESC) is a component commonly used in etching, deposition or CMP. It uses Coulomb force or Johnson-Rabec effect to firmly fix the wafer without the need for additional mechanical clamps. At the same time, the [&hellip;]<\/p>","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"full-width-container","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-4426","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/pages\/4426","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/comments?post=4426"}],"version-history":[{"count":0,"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/pages\/4426\/revisions"}],"wp:attachment":[{"href":"https:\/\/jundro.io\/de\/wp-json\/wp\/v2\/media?parent=4426"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}