Semiconductor Porous Ceramic Vacuum Chuck
Porous ceramic chucks are a type of vacuum chuck that uses micron/submicron interconnected channels to achieve uniform negative pressure adsorption. Compared to traditional grooved or perforated metal chucks, porous ceramics can provide uniform adsorption across the entire surface without localized depressions, greatly reducing the deformation and localized stress caused by thin wafers/wafers being “sucked into