Alumina Ceramic End Effector / Handling Arm

Alumina Ceramic End Effector / Handling Arm is used to transport semiconductor wafers

Alumina Ceramic End Effector / Handling Arm is a precision component made of high-purity alumina. It has ultra-high bending strength and high temperature resistance. It can effectively reduce contamination and plays a key role in the wafer handling process.

Semiconductor Ceramic Parts

Data Sheet

Material	99.8% Alumina
Density	3.93（g/cm³）
Vickers Hardness	18GPa
Flexural Strength	314MPa
Compressive Strength	2556（GPa）
Young’s modulus	358（Gpa）
Thermal Conductivity	34–39W/m·K
Maximum Operating Temperature	1765°C
Dielectric Constant	9.85（1 MHz）

Advantages

✅ High temperature resistant

✅ Good electrical insulation

✅ Smooth surface reduces particle contamination

✅ High corrosion resistance

✅ High mechanical strength

Application

✅ Vacuum adsorption of wafers in EFEM systems and sorters

✅ Etching and chemical vapor deposition (CVD) equipment

✅ Pre-/post-lithography process handling

✅ Semiconductor wafer handling (200 mm / 300 mm wafers)

✅ Laser optics assembly

Contact us via form

Not sure which ceramic material is suitable for your application? Contact our experts for assistance